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Welcome to the 2015 International Conference on Planarization/CMP Technology! This year's conference is held in Chandler, Arizona, USA (southeast edge of Phoenix) on September 30 - October 2 at the Wild Horse Pass Hotel and Casino resort. The conference is co-sponsored by Clarkson University, the American Vacuum Society (NCCAVS), and IEEE. We are honored to have the annual CAMP conference join us for this year only (the next CAMP conference will be in August 2016). ICPT is the world's premier conference for scientific exchange focused on planarization, which is mainly chemical mechanical planarization (CMP). It represents the collaborative effort of CMP Users Groups from all six major semiconductor technology regions of the world (USA, Japan, South Korea, Europe, Taiwan and China). The format for Thursday morning of this year's conference has been adapted to be all invited talks similar to the traditional CAMP format. The speakers were selected by Professor Babu and the
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